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FT-IR/ATR을 이용한 실리콘 웨이퍼 기판 위의 Polydimethysiloxane의 분석 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 유근걸 | - |
| dc.date.accessioned | 2021-08-11T22:27:00Z | - |
| dc.date.available | 2021-08-11T22:27:00Z | - |
| dc.date.created | 2021-06-17 | - |
| dc.date.issued | 2014-08 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/sch/handle/2021.sw.sch/11965 | - |
| dc.language | 한국어 | - |
| dc.language.iso | ko | - |
| dc.publisher | 순천향대학교 | - |
| dc.title | FT-IR/ATR을 이용한 실리콘 웨이퍼 기판 위의 Polydimethysiloxane의 분석 연구 | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 유근걸 | - |
| dc.identifier.bibliographicCitation | 순천향산업기술연구소논문지, v.20, no.1, pp.59 - 62 | - |
| dc.relation.isPartOf | 순천향산업기술연구소논문지 | - |
| dc.citation.title | 순천향산업기술연구소논문지 | - |
| dc.citation.volume | 20 | - |
| dc.citation.number | 1 | - |
| dc.citation.startPage | 59 | - |
| dc.citation.endPage | 62 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 1 | - |
| dc.subject.keywordAuthor | FT-IR ATR 실리콘 웨이퍼 Polydimethylsiloxane 분석 | - |
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