Implementation of PDMS-based Slanted Edge-type Microelectrode Array for Neural Stimulation
- Authors
- 김선형
- Issue Date
- Dec-2017
- Publisher
- Science and Engineering Research Support Society
- Keywords
- Slanted-edge electrode; PDMS; Neural stimulation; photolithography; current density distribution; current leakage
- Citation
- International Journal of Control and Automation, v.10, no.12, pp.165 - 176
- Journal Title
- International Journal of Control and Automation
- Volume
- 10
- Number
- 12
- Start Page
- 165
- End Page
- 176
- URI
- https://scholarworks.bwise.kr/sch/handle/2021.sw.sch/6928
- ISSN
- 2005-4297
- Abstract
- PDMS-based multi-electrodes are widely used in acute experiments for neural
interfaces, and generally have a vertical-edge electrode structure. Previous studies have
shown that when stimulating neural tissue with a vertical-edge electrode, a high current
density is produced at the edge of the electrode, which makes uniform stimulation
difficult. However, slanted-edge electrodes can induce a relatively uniform current
density distribution. PDMS is a very stable material, physically and chemically; thus, it is
difficult to produce slanted-edge electrodes because no efficient etching process exists. In
order to address this problem, we propose a process to fabricate sloped structures using
the under-exposure characteristics of photolithography, and to fabricate sloped holes
efficiently in PDMS by using it as a cast structure. The validity of the proposed process
was verified by fabricating vertical-edge, slanted-edge, and surface-mounted edge
electrodes. We verified the current density distribution according to the electrode
structure by simulation, and applied signals to vertical-edge and slanted-edge samples to
observe the current leakage. It has been confirmed that the slanted-edge structure
improves the stability and reliability of the electrode.
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