Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Journal Title
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
ISSN
- E 2166-2746 | P 1071-1023 | 1071-1023 | 2166-2746
Publisher
- American Institute of Physics
- AIP
Listed on(Coverage)
JCR | 1997-2019 |
SCI | 2010-2019 |
SCIE | 2010-2021 |
CC | 2016-2021 |
SCOPUS | 2017-2020 |