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Dependence of the electrical and optical properties on the bias voltage for ZnO : Al films deposited by r.f. magnetron sputtering
Lee, JH[Lee, Jae-Hyeong]; Song, JT[Song, Jun-Tae]
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Issue Date
2008
Citation
THIN SOLID FILMS, v.516, no.7, pp.1377 - 1381
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ELSEVIER SCIENCE SA
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Lee, JH[Lee, Jae-Hyeong]
1
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bias voltage
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DC
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FLEXIBLE SUBSTRATE
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GAS
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ITO FILMS
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LOW-TEMPERATURE
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PLASMA
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polymer substrate
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r.f. magnetron sputtering
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