Ju, M[Ju, Minkyu]; Mallem, K[Mallem, Kumar]; Dutta, S[Dutta, Subhajit]; Balaji, N[Balaji, Nagarajan]; Oh, D[Oh, Donghyun]; Cho, EC[Cho, Eun-Chel]; Cho, YH[Cho, Young Hyun]; Kim, Y[Kim, Youngkuk]; Yi, J[Yi, Junsin]
ArticleIssue Date2018CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.85, pp.68 - 75PublisherELSEVIER SCI LTD