Hussain S.Q.[Hussain S.Q.]; Mallem K.[Mallem K.]; Kim Y.J.[Kim Y.J.]; Tuan Le A.H.[Tuan Le A.H.]; Khokhar M.Q.[Khokhar M.Q.]; Kim S.[Kim S.]; Dutta S.[Dutta S.]; Sanyal S.[Sanyal S.]; Kim Y.[Kim Y.]; Park J.[Park J.], et al.
ArticleIssue Date2019CitationMaterials Science in Semiconductor Processing, v.91, pp.267 - 274PublisherElsevier Ltd