Jang, K[Jang, Kyungsoo]; Lee, K[Lee, Kwangsoo]; Kim, J[Kim, Junsik]; Hwang, S[Hwang, Sunghyun]; Lee, J[Lee, Jeongin]; Dhungel, SK[Dhungel, Suresh Kumar]; Jung, S[Jung, Sungwook]; Yi, JS[Yi, Junsin]
ArticleIssue Date2006CitationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, v.9, no.6, pp.1137 - 1141PublisherELSEVIER SCI LTD