Kim, NH[Kim, Nam-Hoon]; Kim, SY[Kim, Sang-Yong]; Lee, HK[Lee, Hyun-Ki]; Lee, KY[Lee, Kang-Yeon]; Kim, CI[Kim, Chang-Il]; Chang, EG[Chang, Eui-Goo]
ArticleIssue Date2007CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.25, no.6, pp.1819 - 1822PublisherA V S AMER INST PHYSICS