Han, J.-H.[Han, J.-H.]; Lee, T.Y.[Lee, T.Y.]; Kim, D.Y.[Kim, D.Y.]; Yoo, J.-B.[Yoo, J.-B.]; Park, C.-Y.[Park, C.-Y.]; Choi, J.J.[Choi, J.J.]; Jung, T.[Jung, T.]; Han, I.T.[Han, I.T.]; Kim, J.M.[Kim, J.M.]
ArticleIssue Date2003CitationProceedings of the IEEE International Vacuum Microelectronics Conference, IVMC, v.2003-January, pp.295 - 296