Lee Y.S.[Lee Y.S.]; Na S.W.[Na S.W.]; Song S.G.[Song S.G.]; Kim Y.M.[Kim Y.M.]; Lee N.-E.[Lee N.-E.]; Ahn J.H.[Ahn J.H.]
ArticleIssue Date2003CitationDigest of Papers - Microprocesses and Nanotechnology 2003 - 2003 International Microprocesses and Nanotechnology Conference, MNC 2003, pp.258 - 259