Kim, TG[Kim, Tae Geun]; Kim, BH[Kim, Byung Hun]; Kang, IY[Kang, In-Yong]; Chung, YC[Chung, Yong-Chae]; Ahn, J[Ahn, Jinho]; Lee, SY[Lee, Seung Yoon]; Park, IS[Park, In-Sung]; Kim, CY[Kim, Chung Yong]; Lee, NE[Lee, Nae-Eung]
ArticleIssue Date2006CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.24, no.6, pp.2820 - 2823PublisherA V S AMER INST PHYSICS