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반발력 보상 기구가 적용된 공기 베어링 선형 모터 모션 스테이지
- Authors
- 안형준
- Issue Date
- Dec-2015
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회 2015년도 추계학술대회
- Conference Name
- 한국정밀공학회 2015년도 추계학술대회
- Place
- KO
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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Related Researcher
- Ahn, Hyeong Joon
- College of Engineering (School of Mechanical Engineering)