Motion input generation of a linear motor motion stage with a passive reaction force compensation (RFC) mechanism using optimal control theory

Abstract

Vibration of the system base can be significantly reduced by using passive reaction force compensation (RFC) mechanism with movable magnet track. Vibration of system base should be minimized while the magnet track motion meets position constraints to avoid collision with the system base. In this paper, we propose a motion input generation method for the passive RFC mechanism using optimal control theory. First, conventional input shaping method or delay time filter is applied to the passive RFC method and the simulation result shows that the motion input using conventional method increases the rise time of the move too much. On the other hand, both vibration of the system base can be reduced and requirement of magnet track motion can be guaranteed with the proposed motion input. Finally, the effective of the proposed motion input using optimal control theory is verified with simulations. © 2016 IEEE.