Software-Based Integral Product Architecture for Modular Motion Control System of a RFC Linear Motor Motion Stage: Model-Based DOB for Residual Vibration Suppression

Abstract

Together with strong ICT technology and concept of smart factory, motion control system is driving innovation and increased productivity across the industrial landscape. Thus, motion control systems built with modular approach has ever-longer lists of demands for performance improvement. This paper presents software-based integral product architecture for the modular motion control system of a RFC linear motor motion stage: a model-based DOB for residual vibration suppression. First, the modular motion control system of a linear motor motion stage with air bearing is introduced and its digital twin or multi-rate simulation model is verified with experiments. Then, software-based integral product approach or a model-based DOB is applied to improve the performances of the linear motor stage and its feasibility is confirmed based on the simulation model. Auxiliary software to implement the model-based DOB into a commercial motion control are developed including excitation, DOB user code and data import. Finally, the model-based DOB is shown to improve both motion jitter and settling time of the motion stage through experiments. Precisely, 93% of the following error and 84% the settling time of +/- 0.5 mu m window are improved.