Semi-active reaction force compensation for a linear motor motion stage
- Authors
- Duc Canh Nguyen; Ahn, Hyeong-Joon
- Issue Date
- Jul-2016
- Publisher
- KOREAN SOC PRECISION ENG
- Keywords
- Linear motor motion stage; Residual vibration; Reaction force compensation; Semi-active method
- Citation
- INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v.17, no.7, pp.857 - 862
- Journal Title
- INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
- Volume
- 17
- Number
- 7
- Start Page
- 857
- End Page
- 862
- URI
- http://scholarworks.bwise.kr/ssu/handle/2018.sw.ssu/7567
- DOI
- 10.1007/s12541-016-0104-y
- ISSN
- 2234-7593
- Abstract
- Acceleration and deceleration of a mover excite unwanted vibration to the system base, causing a significant reduction of life and productivity to manufacturing equipment. The system base vibration of a linear motor motion stage can be reduced with a passive reaction force compensation (RFC) mechanism. However, the passive RFC mechanism cannot provide the capability to adjust its stiffness and damping coefficient in real-time. Therefore, resonance may occur if the frequency of the passive RFC mechanism accidentally matches with the frequency components of applied motion profile. This paper presents a semi-active RFC method for a linear motor motion stage using an additional fixed coil. The semi-active RFC mechanism can adjust damping coefficient by changing the resistor load or switching the period of the additional fixed coil. The semi-active RFC mechanism also does not require an additional amplifier or control axis. Mathematical analysis of the semi-active RFC is presented to demonstrate the adjustable damping capability by changing the load resistor. Finally, the effectiveness of the proposed semi-active RFC mechanism is verified via simulations and experiments.
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Collections - College of Engineering > Department of Mechanical Engineering > 1. Journal Articles
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