Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Choe, Seunghoe | - |
dc.contributor.author | Kim, Myung Jun | - |
dc.contributor.author | Kim, Hoe Chul | - |
dc.contributor.author | Lim, Taeho | - |
dc.contributor.author | Park, Kyung Ju | - |
dc.contributor.author | Kim, Kwang Hwan | - |
dc.contributor.author | Ahn, Sang Hyun | - |
dc.contributor.author | Lee, Anna | - |
dc.contributor.author | Kim, Soo-Kil | - |
dc.contributor.author | Kim, Jae Jeong | - |
dc.date.available | 2019-03-08T22:36:29Z | - |
dc.date.issued | 2014-02 | - |
dc.identifier.issn | 1572-6657 | - |
dc.identifier.issn | 1873-2569 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/12494 | - |
dc.description.abstract | In this work, the degradation of poly(ethylene glycol-propylene glycol) copolymer (PEG-PPG) and its effect on the electrodeposition of Cu were investigated. PEG-PPG became fragmented during the electrodeposition with changing its terminal groups from hydroxyl to aldehyde, formic ester, and ketone. The aged solution showed a higher saturation current density than the fresh solution in chronoamperometry (CA) measurements, resulting from an easier desorption of the cleaved PEG-PPG from the copper surface through the competition with bis-(3-sulfopropyl)-disulfide (SPS). Furthermore, the electrical resistivity of Cu films deposited from the aged solution increased due to a decrease in the grain sizes. (C) 2014 Published by Elsevier B.V. | - |
dc.format.extent | 7 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Degradation of poly(ethylene glycol-propylene glycol) copolymer and its influences on copper electrodeposition | - |
dc.type | Article | - |
dc.identifier.doi | 10.1016/j.jelechem.2013.12.023 | - |
dc.identifier.bibliographicCitation | JOURNAL OF ELECTROANALYTICAL CHEMISTRY, v.714, pp 85 - 91 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.wosid | 000331859600014 | - |
dc.identifier.scopusid | 2-s2.0-84892724945 | - |
dc.citation.endPage | 91 | - |
dc.citation.startPage | 85 | - |
dc.citation.title | JOURNAL OF ELECTROANALYTICAL CHEMISTRY | - |
dc.citation.volume | 714 | - |
dc.type.docType | Article | - |
dc.publisher.location | 스위스 | - |
dc.subject.keywordAuthor | Copper electrodeposition | - |
dc.subject.keywordAuthor | Additive | - |
dc.subject.keywordAuthor | Poly(ethylene glycol-propylene glycol) | - |
dc.subject.keywordAuthor | Decomposition | - |
dc.subject.keywordAuthor | Cyclic voltammetry stripping | - |
dc.subject.keywordPlus | SUPERCONFORMAL CU ELECTRODEPOSITION | - |
dc.subject.keywordPlus | ADVANCED INTERCONNECT METALLIZATION | - |
dc.subject.keywordPlus | POLYETHYLENE-GLYCOL | - |
dc.subject.keywordPlus | THERMAL-DEGRADATION | - |
dc.subject.keywordPlus | TRIBLOCK COPOLYMER | - |
dc.subject.keywordPlus | ORGANIC ADDITIVES | - |
dc.subject.keywordPlus | BIS(3-SULFOPROPYL) DISULFIDE | - |
dc.subject.keywordPlus | MOLECULAR-WEIGHT | - |
dc.subject.keywordPlus | CHLORIDE-IONS | - |
dc.subject.keywordPlus | ACCELERATOR | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Electrochemistry | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Analytical | - |
dc.relation.journalWebOfScienceCategory | Electrochemistry | - |
dc.description.journalRegisteredClass | sci | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
84, Heukseok-ro, Dongjak-gu, Seoul, Republic of Korea (06974)02-820-6194
COPYRIGHT 2019 Chung-Ang University All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.