Analysis of a nano positioning actuator using a numerical method combined with a analytic method

Abstract

In this paper, we report on our study of a Nano Positioning Actuator (NPA), which uses an impact/inchworm mechanism. Many kinds of similar precise positioning actuators, which use the same working mechanism, are being and have been proposed by many researchers for several decades. But, the characteristic analysis and design method of the NPA has not been proposed yet. Also, the characteristic analysis and design methods of similar machines were approximate and ineffective. Hence, we present in this paper an analysis methodology for the NPA using the 3D FEM combined with an analytic method, shedding light on the complex working mechanism, and taking all effective components into consideration for an exact and effective characteristic analysis of the NPA and similar machines. In this study, the mechanical system and the driving circuit of an NPA were prototyped. Finally, the effectiveness of an NPA, the reasonableness of a clarified complex working mechanism, and the adequacy of the proposed analysis method were validated by experimental data.