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Real-time Raman analysis of cleaning solution: Determination of Al/Alq3 residue in cleaning mixture

Authors
Cui, YinhuaShim, Ho JaeGao, YuanPyo, Sung Gyu
Issue Date
Apr-2019
Publisher
WILEY
Keywords
cleaning solution; inorganic; organic residue; Raman spectroscopy; real-time; TFD4
Citation
JOURNAL OF RAMAN SPECTROSCOPY, v.50, no.4, pp 571 - 575
Pages
5
Journal Title
JOURNAL OF RAMAN SPECTROSCOPY
Volume
50
Number
4
Start Page
571
End Page
575
URI
https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/25898
DOI
10.1002/jrs.5551
ISSN
0377-0486
1097-4555
Abstract
The analysis of cleaning solutions is difficult, especially if a chemical reaction occurs in the mixed solution. Such chemical reactions lead to real-time changes in the vibrations of the molecules due to changes in the binding forces. Thus, techniques for analyzing mixed solutions are required to determine the processes that occur during the cleaning process. A real-time intermolecular vibrational analysis method employing Raman spectroscopy is used herein for quantitative analysis of organic and inorganic residues in TFD4 cleaning solution (TFD4 comprises a mixture of anionic and nonionic surfactant agents, potassium hydroxide, and stabilizing agents). This study also identifies the development of a new peak, indicative of Al-bonding in TFD4 solution during the cleaning process, and demonstrates that a change in the bonding occurs in the solution. The result of Raman intensity measurement by changing the bonding strength in solution can be applied to make predictive models and analytical techniques that can indicate the relationship of mixed solution.
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창의ICT공과대학 (융합공학부)
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