Ku-band bandpass filters using novel micromachined substrate integrated waveguide structure with embedded silicon vias in benzocyclobutene dielectrics
DC Field | Value | Language |
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dc.contributor.author | Hyeon, Ik-Jae | - |
dc.contributor.author | Park, Woo-Young | - |
dc.contributor.author | Lim, Sungjoon | - |
dc.contributor.author | Baek, Chang-Wook | - |
dc.date.available | 2019-12-21T05:40:55Z | - |
dc.date.issued | 2012-12 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/37189 | - |
dc.description.abstract | In this paper, Ku-band bandpass filters (BPFs) based on a novel micromachined substrate integrated waveguide (SIW) platform with square complementary split-ring resonators (CSRRs) have been demonstrated. The proposed SIW platform adopts embedded metal-coated silicon vias in benzocyclobutene (BCB) dielectric substrate filled into a silicon trench. Unlike conventional SIW BPFs using classical microwave substrates, the proposed BPFs can be integrated with silicon-based circuits or RF MEMS devices since the fabrication process is fully compatible with the silicon process while providing low-loss properties of the waveguide. Three types of BPFs using CPW and microstrip feeding configurations have been designed and fabricated. The microstrip-fed BPF using the same CSRRs shows an improved insertion loss of 1.39 dB at 13.8 GHz with reduced device size compared to the CPW-fed BPF which has an insertion loss of 2.27 dB at 14.1 GHz. The microstrip-fed BPF with different CSRR configurations designed to improve shape factor shows an attenuation factor of 124 dB/GHz, with an insertion loss of 2.3 dB at 21.2 GHz. (C) 2012 Elsevier B.V. All rights reserved. | - |
dc.format.extent | 8 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.title | Ku-band bandpass filters using novel micromachined substrate integrated waveguide structure with embedded silicon vias in benzocyclobutene dielectrics | - |
dc.type | Article | - |
dc.identifier.doi | 10.1016/j.sna.2012.02.012 | - |
dc.identifier.bibliographicCitation | SENSORS AND ACTUATORS A-PHYSICAL, v.188, pp 463 - 470 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.wosid | 000312692500062 | - |
dc.identifier.scopusid | 2-s2.0-84870066186 | - |
dc.citation.endPage | 470 | - |
dc.citation.startPage | 463 | - |
dc.citation.title | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.citation.volume | 188 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.publisher.location | 스위스 | - |
dc.subject.keywordAuthor | Substrate integrated waveguide (SIW) | - |
dc.subject.keywordAuthor | Bandpass filter (BPF) | - |
dc.subject.keywordAuthor | Complementary split-ring resonators (CSRRs) | - |
dc.subject.keywordAuthor | Micromachining process | - |
dc.subject.keywordPlus | SPLIT-RING RESONATORS | - |
dc.subject.keywordPlus | ANTENNA | - |
dc.subject.keywordPlus | SIW | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.description.journalRegisteredClass | sci | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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