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Results 1-1 of 1 (Search time: 0.015 seconds).
Optimization of post-CMP cleaning process for elimination of CMP slurry-induced metallic contaminations
Seo, YJ; Lee, WS; Kim, SY; Park, JS; Chang, EG
Article
Issue Date
2001
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JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, v.12, no.7, pp 411 - 415
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SPRINGER
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Lee, WS
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Park, JS
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Seo, YJ
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ENG
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JOURNAL OF MATERIALS SCIENCE-MATE...
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