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Results 1-1 of 1 (Search time: 0.005 seconds).
Characteristics of alumina slurry by the addition of chemicals and milling condition in copper CMP
Choi, M.-H.; Kim, N.-H.; Kim, S.Y.; Chang, E.-G.
Article
Issue Date
2004
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Proceedings - Electrochemical Society, v.11, pp 254 - 260
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Chang, E.-G.
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Kim, N.-H.
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Kim, S.Y.
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Chemical mechanical polishing
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Dispersion stability
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Particle size analysis
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pH effects
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Slurries
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Slurry stabilizers
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Surface topography
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Tartaric acid
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