A study of nano-indentation test using rhombus-shaped cantilever in atomic force microscope
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Cho, K. | - |
dc.contributor.author | Lee, H.-J. | - |
dc.contributor.author | Kim, J.-H. | - |
dc.contributor.author | Kim, J.-M. | - |
dc.contributor.author | Kim, Y.-K. | - |
dc.contributor.author | Baek, C.-W. | - |
dc.date.accessioned | 2022-04-12T07:40:10Z | - |
dc.date.available | 2022-04-12T07:40:10Z | - |
dc.date.issued | 2006 | - |
dc.identifier.issn | 1013-9826 | - |
dc.identifier.issn | 1662-9795 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/56288 | - |
dc.description.abstract | We have designed and fabricated diamond-shaped AFM cantilevers capable of performing multi-functioning tasks by using single crystal silicon (SCS) micromachining techniques. Structural improvement of the cantilever has clearly solved the crucial problems resulted from using conventional simple beam-AFM cantilever for mechanical testing. After force-calibration of the cantilever, indentation tests are performed to determine the mechanical behaviors in micro/nano-scale as well as topographic imaging. A diamond Berkovich tip of which radius at the apex is approximately 20 nm is attached on the cantilever for the indentation test and 3D topography measurement. The indentation load-depth curves of nano-scale polymeric pattern (PAK01-UV curable blended resin) are measured and surface topography right after indenting is also obtained. Development of this novel cantilever will extend the AFM functionality into the highly sensitive mechanical testing devices in nano/pico scale. | - |
dc.format.extent | 4 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | Trans Tech Publications Ltd | - |
dc.title | A study of nano-indentation test using rhombus-shaped cantilever in atomic force microscope | - |
dc.type | Article | - |
dc.identifier.doi | 10.4028/0-87849-415-4.207 | - |
dc.identifier.bibliographicCitation | Key Engineering Materials, v.326-328 I, pp 207 - 210 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.scopusid | 2-s2.0-33751540433 | - |
dc.citation.endPage | 210 | - |
dc.citation.startPage | 207 | - |
dc.citation.title | Key Engineering Materials | - |
dc.citation.volume | 326-328 I | - |
dc.type.docType | Conference Paper | - |
dc.publisher.location | 스위스 | - |
dc.subject.keywordAuthor | Atomic Force Microscope (AFM) | - |
dc.subject.keywordAuthor | Diamond-shaped cantilever | - |
dc.subject.keywordAuthor | Force-calibration | - |
dc.subject.keywordAuthor | Nanoindentation | - |
dc.subject.keywordAuthor | Nanopattern | - |
dc.subject.keywordPlus | Diamond shaped cantilevers | - |
dc.subject.keywordPlus | Force calibration | - |
dc.subject.keywordPlus | Nanoindentation | - |
dc.subject.keywordPlus | Nanopatterns | - |
dc.subject.keywordPlus | Single crystal silicon (SCS) | - |
dc.subject.keywordPlus | Atomic force microscopy | - |
dc.subject.keywordPlus | Diamonds | - |
dc.subject.keywordPlus | Silicon | - |
dc.subject.keywordPlus | Single crystals | - |
dc.subject.keywordPlus | Surface topography | - |
dc.subject.keywordPlus | Cantilever beams | - |
dc.description.journalRegisteredClass | scopus | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
84, Heukseok-ro, Dongjak-gu, Seoul, Republic of Korea (06974)02-820-6194
COPYRIGHT 2019 Chung-Ang University All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.