Non-catalytic direct synthesis of graphene on Si (111) wafers by using inductively-coupled plasma chemical vapor deposition
- Authors
- Hwang, Sung Won; Shin, Hyunho; Lee, Bongsoo; Choi, Suk-Ho
- Issue Date
- Aug-2016
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- Graphene; Non-catalytic growth; Inductively-coupled plasma chemical vapor deposition
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.69, no.4, pp 536 - 540
- Pages
- 5
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 69
- Number
- 4
- Start Page
- 536
- End Page
- 540
- URI
- https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/6693
- DOI
- 10.3938/jkps.69.536
- ISSN
- 0374-4884
1976-8524
- Abstract
- We employ inductively-coupled plasma chemical vapor deposition for non-catalytic growth of graphene on a Si (111) wafer or glass substrate, which is useful for practical device applications of graphene without transfer processes. At a RF power (P) of 500 W under C2H2 flow, defect-free 3 similar to 5-layer graphene is grown on Si (111) wafers, but on glass substrate, the layer is thicker and defective, as characterized by Raman spectroscopy and electron microscopy. The graphene is produced on Si (111) for P down to 190 W whereas it is almost not formed on glass for P < 250 W, possibly resulting from the weak catalytic-reaction-like effect on glass. These results are discussed based on possible growth mechanisms.
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Collections - College of Engineering > School of Energy System Engineering > 1. Journal Articles
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