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Integrated surface plasmon resonance resonator using silicon on insulator
- Authors
- Oh, Geum-Yoon; Kim, Doo-Gun; Kim, Seon Hoon; Ki, Hyun Chul; Kim, Tae Un; Kim, Hong-Seung; Lee, Tae-Kyeong; Lee, Byeong-Hyeon; Choi, Young-Wan
- Issue Date
- Mar-2013
- Publisher
- SPIE-INT SOC OPTICAL ENGINEERING
- Keywords
- Biosensor; Ring resonator; Silicon on insulator (SOI); Surface plasmon resonance (SPR)
- Citation
- INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XVII, v.8627
- Journal Title
- INTEGRATED OPTICS: DEVICES, MATERIALS, AND TECHNOLOGIES XVII
- Volume
- 8627
- ISSN
- 0277-786X
- Abstract
- We introduce an ultra-sensitive integrated photonic sensor structure using silicon on insulator based triangular resonator, in which a surface plasmon resonance (SPR) gold film is applied on a total internal reflection mirror. We have analyzed and optimized the triangular resonator sensor structure with an extremely small SPR mirror sensing area. Due to the large phase shift in the SPR mirror, a significantly enhanced sensitivity of 800 nm/RIU (refractive index unit) and the maximum peak shift of half free spectral range have been obtained at the SPR angle of 22.65 degrees with Au thickness of 35 nm for the change of the refractive index Delta n = 1x10(-3).
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