Plasma damage control via adjusting the target to substrate distance used to prepare semi-transparent perovskite solar cells
DC Field | Value | Language |
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dc.contributor.author | Ha, Hyeon Uk | - |
dc.contributor.author | Seok, Hae-Jun | - |
dc.contributor.author | Yoon, Saemon | - |
dc.contributor.author | Lee, Dong-Gun | - |
dc.contributor.author | Kang, Dong-Won | - |
dc.contributor.author | Kim, Han-Ki | - |
dc.date.accessioned | 2024-07-18T00:30:30Z | - |
dc.date.available | 2024-07-18T00:30:30Z | - |
dc.date.issued | 2023-06 | - |
dc.identifier.issn | 0042-207X | - |
dc.identifier.issn | 1879-2715 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/cau/handle/2019.sw.cau/74888 | - |
dc.description.abstract | To realize semi-transparent perovskite solar cells (ST-PSCs), a high-quality amorphous transparent cathode must be deposited on the perovskite active layer without plasma damage at room temperature. In this study, we have investigated the effect of the target-to-substrate distance (TSD) on the performance of ST-PSCs during linear facing target sputtering (LFTS) to achieve the plasma damage-free sputtering of Ga and Ti co-doped In2O3 (IGTO) upper cathodes on planar ST-PSCs. We comprehensively compare the electrical, optical, structural, and morphological properties of IGTO cathodes grown using different TSDs and correlate them to performances of the ST-PSCs to determine the optimal TSD. We demonstrate the importance of optimal TSD and deposition mechanism at different TSDs based on the properties of the resulting IGTO films and ST-PSC performance. At an optimal TSD of 6 cm, the amorphous IGTO film demonstrate a sheet resistance of 9.22 Ω/sq. and optical transmittance of 87.74%. The ST-PSC constructed using the optimized IGTO upper cathode exhibit an open-circuit voltage of 1.12 V, short circuit current of 20.23 mA/cm2, fill factor of 83.73%, power conversion efficiency of 18.91%, and average transmittance of 19.31%. Consequently, the choice of the TSD is crucial in LFTS process for the fabrication of high-performance ST-PSCs without plasma damage. © 2023 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.publisher | Elsevier Ltd | - |
dc.title | Plasma damage control via adjusting the target to substrate distance used to prepare semi-transparent perovskite solar cells | - |
dc.type | Article | - |
dc.identifier.doi | 10.1016/j.vacuum.2023.112053 | - |
dc.identifier.bibliographicCitation | Vacuum, v.212 | - |
dc.description.isOpenAccess | N | - |
dc.identifier.wosid | 000978360800001 | - |
dc.identifier.scopusid | 2-s2.0-85151572400 | - |
dc.citation.title | Vacuum | - |
dc.citation.volume | 212 | - |
dc.type.docType | Article | - |
dc.publisher.location | 영국 | - |
dc.subject.keywordAuthor | Ga and Ti co-Doped In2O3 | - |
dc.subject.keywordAuthor | Linear facing target sputtering | - |
dc.subject.keywordAuthor | Plasma damage | - |
dc.subject.keywordAuthor | Semi-transparent perovskite solar cells | - |
dc.subject.keywordAuthor | Transparent cathode | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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