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Results 1-1 of 1 (Search time: 0.005 seconds).
Curvature enhanced adsorbate coverage mechanism for bottom-up superfilling and bump control in damascene processing
Moffat, T. P.; Wheeler, D.;
Kim, Soo-Kil
; Josell, D.
Article
Issue Date
2007
Citation
ELECTROCHIMICA ACTA, v.53, no.1, pp 145 - 154
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
1
Discover
Author
Josell, D.
1
Moffat, T. P.
1
Kim, Soo Kil
1
Wheeler, D.
1
Subject
CL
1
COPPER ELECTRODEPOSITION
1
CU
1
damascene and additives
1
MEMS
1
PEG
1
TRENCHES
1
Date Issued
2007
1
Type
Article
1
Journal
ELECTROCHIMICA ACTA
1
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