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Ellipsometric inspection of the inner surface of pellicle-covered masks Go to Link

Lee, Sangyouk; Song, Chulgi; Rhim, Jusang; Lee, Hyoungjoo; Kyoung, Jaisun; Chin, Soobok; Ahn, Taehyuk; 안일신

ArticleIssue Date2008CitationSPIEPublisherThe international Society for Optical engineering

SCIESCOPUSKCI

Investigation of laminated high-k oxides by using vacuum ultraviolet spectroscopic ellipsometry Go to Link

Song, Chulgi; Namkoong, W.; Chin, Soobok; Ahn, Taehyuk; Lee, Sangyouk; Kyoung, Jaisun; Kim, J.; Jang, Y.; An, Ilsin

ArticleIssue Date2008CitationJournal of the Korean Physical Society, v.53, no.3, pp 1650 - 1654Publisher한국물리학회

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Browsing by Ahn, TaehyukAuthor

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