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Showing results 1 to 2 of 2
OTHER
The effects of current type and density on dishing phenomena in CMP process
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Cho, Woong; Ko, Yong-Jun;
Ahn, Yoomin
; Chang, Gun-Ho; Lee, Jae-Ho
Article
Issue Date
2007
Citation
Solid State Phenomena, v.124-126, pp.307 - 310
Publisher
Scitec Publications Ltd.
SCIE
SCOPUS
The effects of current type and density on dishing phenomena in CMP process
Cho, Woong; Ko, Yong-Jun;
Ahn, Yoomin
; Chang, Gun-Ho; Lee, Jae-Ho
Article
Issue Date
2007
Citation
ADVANCES IN NANOMATERIALS AND PROCESSING, PTS 1 AND 2, v.124-126, pp.307 - +
Publisher
TRANS TECH PUBLICATIONS LTD
1
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