ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

Browsing by Cho, Jung-HyukAuthor

Showing results 1 to 3 of 3

SCIESCOPUS

Acid diffusion length corresponding to post exposure bake time and temperature Go to Link

Park, Jin-Back; Kim, Sung-Hyuck; Kim, Sung-Jin; Cho, Jung-Hyuk; Oh, Hye-Keun

ArticleIssue Date2007CitationJapanese Journal of Applied Physics, v.46, no.1, pp 28 - 30PublisherIOP Publishing Ltd

SCIESCOPUSKCI

Simulation of rectangular isolated pattern images by applying phase shift masks in high-exposure gaps to protect LCD photo masks Go to Link

Cho, Jung-Hyuk; Sohn, Jung-Min; Kim, Sung-Hyuck; Kim, Jong-Sun; Park, Jin-Back; Kim, Sung-Jin; Oh, Hye-Keun

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, no.1, pp 115 - 120Publisher한국물리학회

SCIESCOPUSKCI

The influence of transmission reduction by mask haze formation in ArF lithography Go to Link

Kim, Sung-Jin; Oh, Hye-Keun; An, Ilsin; Kyoung, Jai-Sun; Park, Jin-Back; Cho, Jung-Hyuk; Park, Seung-Wook; Kim, Sung-Hyuck

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, no.2, pp 518 - 523Publisher한국물리학회

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Cho, Jung-HyukAuthor

BROWSE