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Evaluation of partial coherent imaging using the transfer function in immersion lithographyGo to Link

Jung, Mi-Rim; Kwak, Eun-A; Oh, Hye-Keun; Shim, Seong-Bo; Choi, Na-Rak; Kim, Jai-Soon

ArticleIssue Date2006CitationProceedings of SPIE - The International Society for Optical Engineering, v.6154 II, pp U1400 - U1410PublisherSPIE
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