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Showing results 1 to 2 of 2
SCIE
SCOPUS
Possible extreme ultraviolet mask thermal deformation during exposure
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Ban, Chung-Hyun; Kang, In-Hwa; Choi, Won-Yung; Oh, Hye-Keun
Article
Issue Date
2021
Citation
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, v.20, no.3
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
SCIE
SCOPUS
Reduced lifetime of EUV pellicles due to defects
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Ban, Chung-Hyun; Kang, In-Hwa; Choi, Won-Yung; Oh, Hye-Keun
Article
Issue Date
2021
Citation
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, v.20, no.3
Publisher
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
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