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Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storageGo to Link

Nam, Hyo-Jin; Kim, Young-Sik; Lee, Caroline Sunyong; Jin, Won-Hyeog; Jang, Seong-Soo; Cho, Il-Joo; Bu, Jong-Uk; Choi, Woo Beom; Choi, Seung Woo

ArticleIssue Date2007CitationSENSORS AND ACTUATORS A-PHYSICAL, v.134, no.2, pp 329 - 333PublisherELSEVIER SCIENCE SA
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