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Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy Go to Link

Nam, Hyo-Jin; Kim, Young-Sik; Cho, Seong-Moon; Lee, Sunyong Caroline; Bu, Jong-Uk; Hong, Jae-Won

ArticleIssue Date2002CitationJOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, pp 246 - 252Publisher대한전자공학회

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