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Precise thickness controlled growth of Al2O3 thin film using ecofriendly direct liquid injection-based low pressure chemical vapor deposition (DLI-LPCVD)Go to Link

Kim, Jiseon; Hsu, Wei-Fan; Mellaerts, Simon; Bellani, Claudio; Binetti, Alberto; Schouteden, Koen; Locquet, Jean-Pierre; Seo, Jin Won; Lee, Caroline Sunyong

ArticleIssue Date2025CitationCeramics International, v.51, no.22, pp 1 - 8PublisherElsevier Ltd

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