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100×100 Thermo-piezielectric cantilever Array for SPM Nano-data-storage Application

Kim, Yong-Sik; Lee, Sunyong Caroline; Jin, Won-Hyeog; Jang, S.; Nam, Hyo-Jin; Bu, Jong-Uk

ArticleIssue Date2004CitationSensors and Materials, v.17, no.2, pp 57 - 63PublisherM Y U Scientific Publishing Division

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