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Computational approach on PEB process in EUV resist: multi-scale simulation Go to Link

Kim, Muyoung; Moon, Junghwan; Choi, Joonmyung; Lee, Byunghoon; Jeong, Changyoung; Kim, Heebom; Cho, Maenghyo

ArticleIssue Date2017CitationProceedings of SPIE - The International Society for Optical Engineering, pp 1 - 8PublisherSPIE

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Theoretical modeling of PEB procedure on EUV resist using FDM formulation Go to Link

Kim, Muyoung; Moon, Junghwan; Choi, Joonmyung; Lee, Byunghoon; Jeong, Changyoung; Kim, Heebom; Cho, Maenghyo

ArticleIssue Date2018CitationProceedings of SPIE - The International Society for Optical Engineering, pp 1 - 6PublisherSPIE

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Browsing by Jeong, ChangyoungAuthor

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