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32 nm Half pitch formation with high numerical aperture single exposure Go to Link

Jung, Minhee; Park, Joon-Min; Kim, Moonseok; Hong, Sukjoon; Kim, Jaisoon; Park, In-Ho; Oh, Hye-Keun

ArticleIssue Date2009CitationProceedings of SPIE - The International Society for Optical Engineering, v.7274, pp 1 - 9PublisherSPIE

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32 nm Half Pitch Formation with High-Numerical-Aperture Single Exposure Go to Link

Jung, Minhee; Park, Joon-Min; Oh, Hye-Keun

ArticleIssue Date2009CitationJapanese Journal of Applied Physics, v.48, no.10, pp 1 - 5PublisherIOP Publishing Ltd

Heat conduction from hot plate to photoresist on top of wafer including heat loss to the environment Go to Link

Jung, Minhee; Kim, Sarah; Kim, Do Wan; 오혜근

ArticleIssue Date2009Citation2009 SPIE Lithography AsiaPublisherSPIE

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Browsing by Jung, MinheeAuthor

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