ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

한국어
LIBRARY

Browsing by Kang, H.-Y.Author

Showing results 1 to 2 of 2

SCOPUS

Mask error enhancement factor variation with pattern density Go to Link

Kang, H.-Y.; Kim, S.-H.; Lee, C.-H.; Oh, H.-K.

ArticleIssue Date2005CitationProceedings of SPIE - The International Society for Optical Engineering, v.5992, no.2, pp 1 - 8

SCOPUS

Optical properties of photoresist films investigated by real-time spectroscopic ellipsometry

An, I.; Kang, H.-Y.; Oh, H.-K.; Kim, Y.-T.

ArticleIssue Date1997CitationJournal of the Korean Physical Society, v.30, no.SUPPL. PART 1, pp.S226 - S230

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Kang, H.-Y.Author

BROWSE