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Calibration of Non Linear Properties of Pb(Zr, Ti)O3 Cantilever Using Integrated Piezoresistive Sensor for High Speed Atomic Force Microscopy

Nam, Hyo-Jin; Kim, Young-Sik; Cho, Seong-Moon; Lee, Caroline Sunyong; Bu, Jong-Uk; Hong, Jae-Wan; Khim, Zheong-Gu

ArticleIssue Date2002CitationJapanese Journal of Applied Physics, v.41, no.Part 1, No. 11B, pp 7153 - 7157PublisherIOP Publishing

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