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Temperature and critical dimension variation in a single wafer on hot plate due to non-uniform heat sourceGo to Link

Kim, Bobae; Park, Joon-Min; Kim, Hyunsu; An, Ilsin; Park, Seung-Wook; Oh, Hye-Keun

ArticleIssue Date2009CitationProceedings of SPIE - The International Society for Optical Engineering, v.7273, pp 1 - 11PublisherSPIE
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