ScholarWorks@Hanyang University ERICA Campus: Browsing ScholarWorks

Browsing by Lee, Chang-HoAuthor

Showing results 1 to 3 of 3

SCIESCOPUSKCI

Lens aberration effect on the line width for different pattern shapes and duty ratios Go to Link

Lee, Ji-Eun; Park, Seung-Wook; An, Ilsin; Oh, Hye-Keun; Lee, Chang-Ho

ArticleIssue Date2005CitationJournal of the Korean Physical Society, v.47, no.1, pp 47 - 53Publisher한국물리학회

SCIESCOPUSKCI

Mask error enhancement factor variation with pattern density for 65 nm and 90 nm line widths Go to Link

Kang,Hye-Young; Lee, Chang-Ho; Kim, Sung-Hyuck; Oh, Hye-Keun

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.48, no.2, pp 246 - 249Publisher한국물리학회

SCIESCOPUS

The evaluation of aberration effects according to pattern shape and duty ratio Go to Link

Lee, Ji-Eun; Park, Seung-Wook; Lee, Chang-Ho; Oh, Hyun-Wook; Bae, So-Yoon; Oh, Hye-Keun

ArticleIssue Date2005CitationProceedings of SPIE - The International Society for Optical Engineering, v.5754, no.PART 3, pp 1738 - 1749PublisherSPIE

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Browsing by Lee, Chang-HoAuthor

BROWSE