Lim, Joowon; Lee, Geonho; Kim, Beomsu; Lee, Sueng Yoon; Lim, Dohyun; Oh, Junho; Lee, Won Chul
ArticleIssue Date2025CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp 111 - 113PublisherInstitute of Electrical and Electronics Engineers Inc.