ScholarWorks@Hanyang University ERICA Campus

Browsing by Lee, Gi SungAuthor

All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

Showing results 1 to 1 of 1

SCOPUS
A novel solution for next-generation EUV pellicle: Breathable membrane with increased transmittance

Kim, Haneul; Kim, Jungyeon; Kang, Young-Woo; Kim, Min-Woo; Ha, Tae Joong; Lee, Gi Sung; Oh, Hye-Keun; Ahn, Jinho

ArticleIssue Date2024CitationProceedings of SPIE - The International Society for Optical Engineering, v.12953, pp 1 - 5PublisherSPIE
1
CONTACT US

RSS_1.0 RSS_2.0 ATOM_1.0

55 Hanyangdeahak-ro, Sangnok-gu, Ansan, Gyeonggi-do, 15588, Korea+82-31-400-4269 sweetbrain@hanyang.ac.kr

COPYRIGHT © 2021 HANYANG UNIVERSITY. ALL RIGHTS RESERVED.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

BROWSE

한국어