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Is extreme-ultraviolet pellicle possible? - In terms of heat absorption Go to Link

Kim, In-Seon; Lee, Hyung-Cheol; Kim, Eun-Jin; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2012CitationProceedings of SPIE - The International Society for Optical Engineering, v.8322, pp 1 - 10PublisherSPIE

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Temperature behavior of pellicles in extreme ultraviolet lithography Go to Link

Lee, Hyung-Cheol; Kim, Eun-Jin; Kim, Ji-Won; Oh, Hye-Keun

ArticleIssue Date2012CitationJournal of the Korean Physical Society, v.61, no.7, pp 1093 - 1096Publisher한국물리학회

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Browsing by Lee, Hyung-CheolAuthor

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