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Comparison imaging ellipsometry and its application to crystallization of indium oxide thin films Go to Link

Park, Sungmo; Lee, Jungtae; Kim, Hyunjin; Kim, Jaekyun; Kim, Suenne; An, Ilsin

ArticleIssue Date2019CitationJOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, v.37, no.6PublisherA V S AMER INST PHYSICS

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