Ham, Jimin; Lim, Jaemook; Lim, Joowon; Jang, Gunyoung; Lee, Sueng Yoon; Lim, Dohyun; Hong, Sukjoon; Lee, Won Chul
ArticleIssue Date2023CitationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), v.2023-January, pp 625 - 626PublisherInstitute of Electrical and Electronics Engineers Inc.