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A study on the microstructure of Pt/TaN/Si films by high resolution TEM analysis

Cho, Kwang-Nam; Kim, Jong-Wook; Oh, Jae-Eung; Park, Chang-Su; Lee, Sang-In; Lee, Moon-Yong

ArticleIssue Date1998CitationJOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.33, no.supple.2, pp S159 - S161PublisherKOREAN PHYSICAL SOC

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Browsing by Park, Chang-SuAuthor

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