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Browsing by Park, J.-G.Author

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Impact of non-uniform wrinkles for a multi-stack pellicle in EUV lithography Go to Link

Kim, G.-J.; Kim, I.-S.; Yeung, M.; Kim, M.-S.; Park, J.-G.; Oh, H.-K.

ArticleIssue Date2017CitationProceedings of SPIE - The International Society for Optical Engineering, v.10143PublisherSPIE

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Line width roughness variation and printing failures caused by stochastic effect at extreme-ultraviolet exposure Go to Link

Kang, I.-H.; Kim, T.-Y.; Hur, S.-M.; Ban, C.-H.; Park, J.-G.; Oh, H.-K.

ArticleIssue Date2021CitationProceedings of SPIE - The International Society for Optical Engineering, v.11609PublisherSPIE

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Browsing by Park, J.-G.Author

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