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Browsing by Yoo, Myoung-SulAuthor

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Aerial image characterization for the defects in the extreme ultraviolet mask

Yoo, Myoung-Sul; Park, Seung-Wook; Kim, Ok-Kyung; Oh, Hye-Keun

ArticleIssue Date2004CitationJournal of the Korean Physical Society, v.45, no.5, pp 1218 - 1223Publisher한국물리학회

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Aerial image characterization for the defects in the extreme ultraviolet mask Go to Link

Yoo, Myoung-Sul; Park, Seung-Wook; Kim, Jong-Hoi; Kwon, Yeong-Keun; Oh, Hye-Keun

ArticleIssue Date2004CitationProceedings of SPIE - The International Society for Optical Engineering, v.5374, no.PART 2, pp 751 - 759

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Reduction of the absorber shadow effect by changing the absorber side wall angle in extreme ultraviolet lithography Go to Link

Yoo, Myoung-Sul; Jeon, Young-Doo; Oh, Hye-Keun; Ahn, Jin-Ho

ArticleIssue Date2005CitationJournal of the Korean Physical Society, v.46, no.4, pp 1020 - 1024Publisher한국물리학회

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Browsing by Yoo, Myoung-SulAuthor

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