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Development of micro-spot spectroscopic ellipsometer using reflective objectives
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안일신 | - |
| dc.date.accessioned | 2021-06-22T14:30:00Z | - |
| dc.date.available | 2021-06-22T14:30:00Z | - |
| dc.date.created | 2020-12-17 | - |
| dc.date.issued | 2017-03-09 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/10414 | - |
| dc.publisher | Semiconductor Society of India | - |
| dc.title | Development of micro-spot spectroscopic ellipsometer using reflective objectives | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 안일신 | - |
| dc.identifier.bibliographicCitation | Fourth International Symposium on Semiconductor Materials and Devices | - |
| dc.relation.isPartOf | Fourth International Symposium on Semiconductor Materials and Devices | - |
| dc.citation.title | Fourth International Symposium on Semiconductor Materials and Devices | - |
| dc.citation.conferencePlace | Jadavpur University, Kolkata, India | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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